With their high-purity and low metal ion impurities, both critical to ensuring that no contaminants go into the clean-room production of semiconductor wafers and chips, Simrit’s VO628 and VO793 materials were created specifically for use in semiconductor fabrication processes. Both materials can be utilized in a variety of products including O-rings and bonded gates.

 “As a materials specialist, it is our job to ensure industry innovations are possible by developing compounds that can withstand the evolving chemicals, temperatures and materials that threaten traditional semiconductor applications,” said Robert W. Keller, materials development manager, Simrit Division of Freudenberg-NOK. “Our latest material developments, VO628 and VO793, offer superior purity while still providing the extreme performance requirements the semiconductor industry demands.”

VO628 is a 65 nominal Shore A hardness FKM compound, while VO793 is a 75 nominal Shore A hardness FKM compound. Both materials are brown and made with no fillers and minimal metal ion impurities to offer superior high-temperature and long-term compression set characteristics compared to traditional FKM materials.

Offering excellent resistance to oxygen etch and oxygen plasma systems and performance in rapid pump-down high vacuum systems, VO628 and VO793 are useful in semiconductor applications requiring rapid development of high vacuum levels.

The Simrit Division is based at Freudenberg-NOK’s headquarters in Plymouth, Mich. Freudenberg-NOK is part of the Freudenberg and NOK Group Companies, which have total annual sales of more than $7 billion. The global Freudenberg and NOK Group offers an extensive portfolio of precision-molded products for the aerospace, appliance, automotive, marine, medical, off-highway equipment, recreational vehicle and renewable energy markets. For more information, visit the Simrit website at www.simrit.com.

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Editor’s Note:             For a high-res image of Simrit’s VO628 and VO793 materials, please contact Adriana Ferrari at 248-269-1122 or aferrari@bianchipr.com.

Quote taken from the article:

Key points:
• Aerospace applications may call for seals that are fireproof, resist fluids, and work over a large temperature range.

• Viscoelastic properties help elastomeric seals work in subfreezing temperatures.

• Semiconductor and alternative energy applications require low-maintenance seals that resist chemicals and weather.

Simriz 508 is a white perfluoroelastomer (FFKM) material that has a service temperature range of negative six to 300 degrees Celsius and exhibits excellent plasma resistance and minimum particulation in a wide-range of plasma environments. The O-ring is a cost-effective sealing solution that offers very low trace element contamination in both wet and plasma applications.

Ideal for a variety of dry processes, including deposition, oxide and metal plasma etching, ashing, metallization, ion implant and others, the Simriz 508 material is appropriate for the following equipment locations: chamber lid seals; bell jar seals; endpoint windows; gas inlet seals; isolator valve seals; KF fittings; slit valve seals; valve seals; and window seals. Designed for thermal stability and nearly universal protection against chemical attack, Simrit’s proprietary family of Simriz FFKM compounds offers premier sealing performance. All of the Simriz compounds approach PTFE (polytetrafluoroethylene) chemical resistance and have excellent plasma resistance for dry processing. Simrit is the single-source developer of Simriz, starting with the base polymer, thus ensuring complete oversight and continuity in the compounding process, and eliminating any need for costly outsourcing.

For more information or to speak with a Simrit representative about the Simriz 508 material, visit the Simrit booth (#N6289) during SEMICON West 2008 held here from July 15 to 17.

The Simrit Division is based at Freudenberg-NOK’s headquarters in Plymouth, Mich. and is part of the Freudenberg and NOK Group, which has total annual sales of more than $12 billion. Simrit offers an extensive portfolio of sealing solutions for the aerospace, appliance, diesel engine, industrial, marine, off-highway equipment, oil and gas, recreational vehicle and semiconductor markets. For more information, visit the Simrit website at www.simrit.com.

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Editor’s Note: For an electronic image of the Simriz 508 O-ring, please contact Adriana Ferrari at 248-269-1122 or aferrari@bianchipr.com

The Simrit Plate Seals brochure provides detailed descriptions of plate seals, which are hybrid seals designed to incorporate the best features of flat gaskets and O-rings, while eliminating the drawbacks associated with each of those sealing methods. For instance, the brochure highlights groove-bonded and edge-bonded plate seals, Simrit’s proprietary materials for plate seals, and plate seals specifically used in semiconductor and aerospace applications.

Furthermore, the brochure emphasizes the advantages of using plate seals:

• Ease of installation
o Rigid seals are easy to handle and install
o Offers visual confirmation of seal installation
o Seal is chemically and mechanically bonded to mating surface and can not be dislocated
o Requires less sealing force than flat gaskets

• Cost Advantage
o Reduces expensive machining required on mating components
o Single plate/multi-port sealing capabilities reduce inventory and minimize warranty costs due to missing or poorly installed sealing elements
o Allows high pressure sealing without requiring backup rings

• Performance
o Controlled squeeze metal-to-metal contact prevents over-compression, which is known to cause premature seal degradation
o Plate seals have the potential of reducing elastomer exposure and lessening fluid/swell issues

The Simrit Division is based at Freudenberg-NOK’s headquarters in Plymouth, Mich. Freudenberg-NOK is part of the Freudenberg and NOK Group Companies, which have total annual sales of more than $12 billion. The global Freudenberg and NOK Group offers an extensive portfolio of precision-manufactured products for the aerospace, appliance, diesel engine, marine, off-highway equipment, oil and gas, recreational vehicle and semiconductor markets.

For more information, visit the Simrit Web site at www.simrit.com.

Simriz® Perfluoroelastomer Seals

Plymouth, Mich., Oct. 16, 2007 – Simrit – the industrial sealing products division of Freudenberg-NOK – recently released an updated Simriz® Perfluoroelastomer Seals brochure. For a copy of this brochure, visit the Simrit website www.simritna.com and use the Literature Request Form on the “Brochures” page. You can also download a PDF file of the brochure from this page.

The brochure explains that Simriz is a family of perfluoroelastomer compounds developed solely by Simrit and designed to provide superior chemical resistance and thermal stability. Simriz O-rings and molded shapes optimize the following criteria:

• Broad chemical resistance
• Mechanical properties (hardness, tensile strength, etc.)
• Compression set resistance
• High-temperature capability
• Low-temperature flexibility

The brochure provides many concise graphs such as the different Simriz compounds and their unique characteristics (color, hardness, temperature range, elongation%, etc.), thermal stability comparisons, comparative temperature/chemical resistance limits, typical Simriz sealing applications, etc. These graphs easily demonstrate Simriz’ advantage over other compounds.

The Simriz® Perfluoroelastomer Seals brochure further goes on to highlight:

• Simriz for Aerospace Applications including an explanation of the Aerospace Part Numbering System for AS568 and Simriz Aerospace Materials Specifications

• Simriz for Semiconductor Applications including Simriz compound descriptions in more detail and the Semiconductor Parts Numbering System

• Simrit for FDA and Pharmaceutical Applications including the FDA and Pharmaceutical Parts Numbering System for AS568

• Simriz for Industrial Applications including the Industrial Parts Numbering System for AS568 and the physical properties of Simriz compounds for industrial sealing

Finally, the brochure underlines Simrit manufacturing expertise with an explanation of the Sigma Quality levels. Simrit manufacturing provides better than Six Sigma quality, meaning better than 3.4 defects per million manufactured. Simrit quality certificates include: AS9100, EN9100, ISO/TS 16949, Napcap, A2LA Laboratory, Qualifas EASE, and many other customer-specific approvals.

The Simrit Division is based at Freudenberg-NOK’s headquarters in Plymouth, Mich. Freudenberg-NOK is part of the Freudenberg and NOK Group Companies, which have total annual sales of more than $12 billion. The global Freudenberg and NOK Group offers an extensive portfolio of precision-manufactured products for the aerospace, appliance, diesel engine, marine, off-highway equipment, oil and gas, recreational vehicle and semiconductor markets.

For more information, visit the Simrit Web site at www.simrit.com.

PLYMOUTH, Mich., July 9, 2007 – Simrit is expanding its Simriz® brand of perfluoroelastomer compounds with the introduction of the newly formulated Simriz 499 material. The latest in the Simriz line of proprietary materials, Simriz 499 was specifically developed to combine plasma resistance, broad chemical resistance and ultra-low trace metals with reduced adhesion to aluminum and other metal surfaces, for use in valves and doors.

Simrit, the industrial sealing products division of Freudenberg-NOK, will debut its Simriz 499 material during the SEMICON West 2007 show in San Francisco (July 16 to 20). For more information about the compound, visit the Simrit booth (#6486, North Hall).

“We are excited to debut Simriz 499, our latest Simriz material innovation for the semiconductor industry,” said Vinay Nilkanth, vice president, business development, Simrit. “Simriz 499 is a testament to Simrit’s commitment of continually striving to offer our customers the best, most evolved materials and technologies that meet their specific needs.”

The 75 durometer clear perfluoroelastomer material has a service temperature range of -6 to 280 degrees Celsius (21 to 236 degrees Fahrenheit) and offers excellent plasma resistance, very low particle release, wide chemical resistance and very low adhesion to aluminum. Simriz 499 is recommended for a variety of wet and dry processes, including decomposition – LPCVD, CVD, APCVD, HDPCVD, PECVD, RPCVD, SACVD; plasma etch for both oxide and metal; ashing; metallization – PVD, evaporation and sputtering; ion implant; TRP; oxidation; diffusion; lamp anneal; water preparation, cleaning and rinsing; etching; stripping; and copper plating.

The compound’s low adhesion to mating metal substrates makes it an ideal solution for numerous applications, including: vacuum fittings and vessels; bell jar, valve, drain, window, slit valve, isolator valve, chamber lid, door and lid seals; flow meters; connectors; endpoint windows; KF fittings; fittings; filters; pumps; and chemical containers.

Simriz is Simrit’s proprietary family of perfluoroelastomer compounds that offer premier sealing performance. Simrit is the single-source developer of Simriz, starting with the base polymer to ensure complete oversight and continuity in the compounding process and eliminating any need for costly outsourcing.

The Simrit Division is based at Freudenberg-NOK’s headquarters in Plymouth, Mich. Freudenberg-NOK is part of the Freudenberg and NOK Group Companies, which have total annual sales of more than $12 billion. The global Freudenberg and NOK Group offers an extensive portfolio of precision-manufactured products for the semiconductor, aerospace, appliance, diesel engine, marine, off-highway equipment, oil and gas, and recreational vehicle markets.

For more information, visit the Simrit Web site at www.simrit.com.

Editor’s note: For an electronic image of a Simriz 499 O-ring, please contact Adriana Ferrari at 248-269-1122 or aferrari@bianchipr.com

Simrit Bonded Gates

Unique manufacturing process allows seal profiles to be directly bonded to process chamber gates

PLYMOUTH, Mich., July 9, 2007 – Through a unique manufacturing process, Simrit has created bonded gates for the semiconductor industry. In this process, seal profiles are bonded directly to process chamber gates, allowing for less seal movement and reducing contamination in process.

Simrit, the industrial sealing products division of Freudenberg-NOK, will debut its bonded gates during the SEMICON West 2007 show in San Francisco (July 16 to 20). For more information about the new product, visit the Simrit booth (#6486, North Hall).

Simrit’s bonded gates are available in a wide variety of compounds, from fluorocarbons for mild chemical process applications to advanced Simriz® perfluoroelastomers for the most aggressive and particulation-sensitive environments.

“Our new bonded gates eliminate the installation issue caused by the dynamic nature of gate applications,” said Patrick Giorda, director, semiconductor market, Simrit. “The application design requires a very tight fitting o-ring to prevent premature ‘pop-out.’ In this application, O-rings can often be very difficult to install and, if installed incorrectly, perform poorly and cause unscheduled maintenance and possible loss of product. The introduction of Simrit’s new bonded gates eliminates these issues.”

In addition to increasing the ease of installation, Simrit’s bonded gates eliminate the rolling, twisting and the abrasion associated with seal movement during the gate operation of standard O-ring / groove designs, as well as the costly premature seal failures due to seal “pop-out,” which can occur when the gate is actuated. Additionally, bonded gates have an extended service life over O-ring / groove designs, which can extend periodic maintenance cycles and allow for more tool “up-time.”

The Simrit Division is based at Freudenberg-NOK’s headquarters in Plymouth, Mich. Freudenberg-NOK is part of the Freudenberg and NOK Group Companies, which have total annual sales of more than $12 billion. The global Freudenberg and NOK Group offers an extensive portfolio of precision-manufactured products for the semiconductor, aerospace, appliance, diesel engine, marine, off-highway equipment, oil and gas, and recreational vehicle markets.

For more information, visit the Simrit Web site at www.simrit.com.

Editor’s note: For an electronic image of Simrit’s new bonded gate, please contact Adriana Ferrari at 248-269-1122 or aferrari@bianchipr.com.

PLYMOUTH, Mich., July 9, 2007 – Simrit, a division of Freudenberg-NOK, will introduce its new product line of chemical mechanical planarization (CMP) gaskets and membranes at the SEMICON West 2007 show in San Francisco (July 16 to 20). For more information about the new product, visit the Simrit booth (#6486, North Hall).

“Simrit is excited to announce its new line of elastomer products for CMP processes,” said Patrick Giorda, director, semiconductor market, Simrit. “The new line of CMP consumable parts will include membranes and gaskets for both 200mm and 300mm processes.”

Simrit’s technological advantages in material development and manufacturing processes give the company’s membranes an advantage over the competition. The company’s molding technology and material development allows “uniformed” physical properties across the entire part. Controlling consistent durometer and modulus are essential for membrane performance in the planarization process.
Simrit excels at producing critical parts in a wide variety of material choices including EPDM, Neoprene, Silicone, FKM and its proprietary family of Simriz® perfluoroelastomer materials.

The Simrit Division is based at Freudenberg-NOK’s headquarters in Plymouth, Mich. Freudenberg-NOK is part of the Freudenberg and NOK Group Companies, which have total annual sales of more than $12 billion. The global Freudenberg and NOK Group offers an extensive portfolio of precision-manufactured products for the semiconductor, aerospace, appliance, diesel engine, marine, off-highway equipment, oil and gas, and recreational vehicle markets.

For more information, visit the Simrit Web site at www.simrit.com.