Archive for July, 2007
Simrit to Debut Simriz® 499 Perfluoroelastomer Compound at SEMICON West 2007 |
Jul 079 |
Formulated with proprietary technology, Simriz 499 offers excellent resistance to solvents and acids
PLYMOUTH, Mich., July 9, 2007 – Simrit is expanding its Simriz® brand of perfluoroelastomer compounds with the introduction of the newly formulated Simriz 499 material. The latest in the Simriz line of proprietary materials, Simriz 499 was specifically developed to combine plasma resistance, broad chemical resistance and ultra-low trace metals with reduced adhesion to aluminum and other metal surfaces, for use in valves and doors.
Simrit, the industrial sealing products division of Freudenberg-NOK, will debut its Simriz 499 material during the SEMICON West 2007 show in San Francisco (July 16 to 20). For more information about the compound, visit the Simrit booth (#6486, North Hall).
“We are excited to debut Simriz 499, our latest Simriz material innovation for the semiconductor industry,” said Vinay Nilkanth, vice president, business development, Simrit. “Simriz 499 is a testament to Simrit’s commitment of continually striving to offer our customers the best, most evolved materials and technologies that meet their specific needs.”
The 75 durometer clear perfluoroelastomer material has a service temperature range of -6 to 280 degrees Celsius (21 to 236 degrees Fahrenheit) and offers excellent plasma resistance, very low particle release, wide chemical resistance and very low adhesion to aluminum. Simriz 499 is recommended for a variety of wet and dry processes, including decomposition – LPCVD, CVD, APCVD, HDPCVD, PECVD, RPCVD, SACVD; plasma etch for both oxide and metal; ashing; metallization – PVD, evaporation and sputtering; ion implant; TRP; oxidation; diffusion; lamp anneal; water preparation, cleaning and rinsing; etching; stripping; and copper plating.
The compound’s low adhesion to mating metal substrates makes it an ideal solution for numerous applications, including: vacuum fittings and vessels; bell jar, valve, drain, window, slit valve, isolator valve, chamber lid, door and lid seals; flow meters; connectors; endpoint windows; KF fittings; fittings; filters; pumps; and chemical containers.
Simriz is Simrit’s proprietary family of perfluoroelastomer compounds that offer premier sealing performance. Simrit is the single-source developer of Simriz, starting with the base polymer to ensure complete oversight and continuity in the compounding process and eliminating any need for costly outsourcing.
The Simrit Division is based at Freudenberg-NOK’s headquarters in Plymouth, Mich. Freudenberg-NOK is part of the Freudenberg and NOK Group Companies, which have total annual sales of more than $12 billion. The global Freudenberg and NOK Group offers an extensive portfolio of precision-manufactured products for the semiconductor, aerospace, appliance, diesel engine, marine, off-highway equipment, oil and gas, and recreational vehicle markets.
For more information, visit the Simrit Web site at www.simrit.com.
Editor’s note: For an electronic image of a Simriz 499 O-ring, please contact Adriana Ferrari at 248-269-1122 or aferrari@bianchipr.com
Simrit Introduces Bonded Gates to the Semiconductor Industry |
Jul 079 |
Simrit Bonded Gates
Unique manufacturing process allows seal profiles to be directly bonded to process chamber gates
PLYMOUTH, Mich., July 9, 2007 – Through a unique manufacturing process, Simrit has created bonded gates for the semiconductor industry. In this process, seal profiles are bonded directly to process chamber gates, allowing for less seal movement and reducing contamination in process.
Simrit, the industrial sealing products division of Freudenberg-NOK, will debut its bonded gates during the SEMICON West 2007 show in San Francisco (July 16 to 20). For more information about the new product, visit the Simrit booth (#6486, North Hall).
Simrit’s bonded gates are available in a wide variety of compounds, from fluorocarbons for mild chemical process applications to advanced Simriz® perfluoroelastomers for the most aggressive and particulation-sensitive environments.
“Our new bonded gates eliminate the installation issue caused by the dynamic nature of gate applications,” said Patrick Giorda, director, semiconductor market, Simrit. “The application design requires a very tight fitting o-ring to prevent premature ‘pop-out.’ In this application, O-rings can often be very difficult to install and, if installed incorrectly, perform poorly and cause unscheduled maintenance and possible loss of product. The introduction of Simrit’s new bonded gates eliminates these issues.”
In addition to increasing the ease of installation, Simrit’s bonded gates eliminate the rolling, twisting and the abrasion associated with seal movement during the gate operation of standard O-ring / groove designs, as well as the costly premature seal failures due to seal “pop-out,” which can occur when the gate is actuated. Additionally, bonded gates have an extended service life over O-ring / groove designs, which can extend periodic maintenance cycles and allow for more tool “up-time.”
The Simrit Division is based at Freudenberg-NOK’s headquarters in Plymouth, Mich. Freudenberg-NOK is part of the Freudenberg and NOK Group Companies, which have total annual sales of more than $12 billion. The global Freudenberg and NOK Group offers an extensive portfolio of precision-manufactured products for the semiconductor, aerospace, appliance, diesel engine, marine, off-highway equipment, oil and gas, and recreational vehicle markets.
For more information, visit the Simrit Web site at www.simrit.com.
Editor’s note: For an electronic image of Simrit’s new bonded gate, please contact Adriana Ferrari at 248-269-1122 or aferrari@bianchipr.com.
Simrit to Unveil New Product Line of Chemical Mechanical Planarization |
Jul 079 |
New process is changing the way semiconductor products are produced
PLYMOUTH, Mich., July 9, 2007 – Simrit, a division of Freudenberg-NOK, will introduce its new product line of chemical mechanical planarization (CMP) gaskets and membranes at the SEMICON West 2007 show in San Francisco (July 16 to 20). For more information about the new product, visit the Simrit booth (#6486, North Hall).
“Simrit is excited to announce its new line of elastomer products for CMP processes,” said Patrick Giorda, director, semiconductor market, Simrit. “The new line of CMP consumable parts will include membranes and gaskets for both 200mm and 300mm processes.”
Simrit’s technological advantages in material development and manufacturing processes give the company’s membranes an advantage over the competition. The company’s molding technology and material development allows “uniformed” physical properties across the entire part. Controlling consistent durometer and modulus are essential for membrane performance in the planarization process.
Simrit excels at producing critical parts in a wide variety of material choices including EPDM, Neoprene, Silicone, FKM and its proprietary family of Simriz® perfluoroelastomer materials.
The Simrit Division is based at Freudenberg-NOK’s headquarters in Plymouth, Mich. Freudenberg-NOK is part of the Freudenberg and NOK Group Companies, which have total annual sales of more than $12 billion. The global Freudenberg and NOK Group offers an extensive portfolio of precision-manufactured products for the semiconductor, aerospace, appliance, diesel engine, marine, off-highway equipment, oil and gas, and recreational vehicle markets.
For more information, visit the Simrit Web site at www.simrit.com.